Vibration control in microelectronics, optics, and metrology
4-6 November 1991, San Jose, California
Edición de la obra Vibration control in microelectronics, optics, and metrology
| Autor | Colin G. Gordon |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1992 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| Páginas | 369 |
| ISBN-10 | 0819407577 |
| OCLC | 25620040 |
| LCCN | 92080102 |
| Serie | Proceedings / SPIE--the International Society for Optical Engineering ; · v. 1619 · Proceedings of SPIE--the International Society for Optical Engineering ; |