Surface chemical cleaning and passivation for semiconductor processing
symposium held April 13-15, 1993, San Francisco, California, U.S.A.
Edición de la obra Surface chemical cleaning and passivation for semiconductor processing
| Autor | Gregg S. Higashi, Eugene A. Irene |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | 1993 |
| Lugar | Pittsburgh, PA |
| Idioma | inglés |
| Páginas | 518 |
| ISBN-10 | 1558992138 |
| OCLC | 502599567, 28583418 |
| LCCN | 93028784 |