Spectroscopic characterization techniques for semiconductor technology V
25-26 January 1994, Los Angeles, California
Edición de la obra Spectroscopic Characterization Techniques for Semiconductor Technology V
| Autor | Orest J. Glembocki |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1994 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 220 |
| ISBN-10 | 0819414360 |
| LCCN | 93087142 |
| Serie | Proceedings / SPIE--the International Society for Optical Engineering -- v. 2141 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 2141. |
| Número de Cutter |