Spectroscopic characterization techniques for semiconductor technology IV
25-26 March 1992, Somerset, New Jersey
Edición de la obra Spectroscopic characterization techniques for semiconductor technology IV
| Autor | Orest J. Glembocki |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1992 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 308 |
| ISBN-10 | 0819408395 |
| OCLC | 26322290 |
| LCCN | 92081135 |
| Serie | Proceedings / SPIE--the International Society for Optical Engineering -- v. 1678 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 1678. |