
Silicon materials--processing, characterization and reliability
symposium held April 1-5, 2002, San Francisco, California, U.S.A.
Edición de la obra Silicon Materials--Processing, Characterization and Reliability (Materials Research Society Symposia Proceedings, 716.)
| Autor | Janice L. Veteran |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | 2002 |
| Lugar | Warrendale, PA |
| Idioma | inglés |
| Páginas | 672 |
| ISBN-10 | 1558996524 |
| OCLC | 50684741 |
| LCCN | 2002035989 |
| Serie | Materials Research Society symposium proceedings -- v. 716 · Materials Research Society symposia proceedings -- 716. |