Silicon front-end junction formation--physics and technology
symposium held April 13-15, 2004, San Francisco, California, U.S.A.
Edición de la obra Silicon front-end junction formation--physics and technology
| Autor | Peter Pichler, Richard Lindsay |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | 2004 |
| Lugar | Warrendale, Pa |
| Idioma | inglés |
| Páginas | 494 |
| ISBN-10 | 1558997601 |
| OCLC | 56190082 |
| LCCN | 2004275228 |
| Serie |