Semiconductor Materials Analysis and Fabrication Process Control
Proceedings of Symposium d on Diagnostic Techniques for Semiconductor Materials an (European ... Research Society Symposia Proceedings)
Edición de la obra Semiconductor materials analysis and fabrication process control
| Autor | G. M. Crean, R. Stuck |
|---|---|
| Editorial | North-Holland |
| Fecha de publicación | June 1993 |
| Idioma | inglés |
| Páginas | 338 |
| ISBN-13 | 9780444899088 |
| ISBN-10 | 0444899081 |
| OCLC | 185026159 |
| Número de Cutter | C912s |