Semiconductor materials analysis and fabrication process control
proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992
Edición de la obra Semiconductor materials analysis and fabrication process control
| Autor | G. M. Crean, R. Stuck |
|---|---|
| Editorial | North-Holland |
| Fecha de publicación | 1993 |
| Lugar | Amsterdam, the Netherlands |
| Idioma | inglés |
| Páginas | 338 |
| ISBN-10 | 0444899081 |
| OCLC | 185026159 |
| LCCN | 93155906 |