Resolution enhancement techniques in optical lithography
Edición de la obra Resolution enhancement techniques in optical lithography
| Autor | Alfred Kwok-Kit Wong |
|---|---|
| Editorial | SPIE Optical Engineering Press, SPIE Publications, Brand: SPIE Publications, SPIE Press |
| Fecha de publicación | 2001 |
| Lugar | Bellingham, WA |
| Idioma | inglés |
| Páginas | 214 |
| ISBN-10 | 0819439959 |
| OCLC | 45879722 |
| LCCN | 2001020028 |
| Serie | Tutorial texts in optical engineering -- v. TT 47. |
| Número de Cutter |