Process development for 3D silicon microstructures, with application to mechanical sensor devices
Edición de la obra Process development for 3D silicon microstructures, with application to mechanical sensor devices
| Autor | Eric Peeters |
|---|---|
| Fecha de publicación | 19uu |
| Idioma | inglés |
| Páginas | 332 |
| OCLC | 55648247 |
| Número de Cutter | P375p |