Process and materials characterization and diagnostics in IC manufacturing
27-28 February 2003, Santa Clara, California, USA
Edición de la obra Process and materials characterization and diagnostics in IC manufacturing
| Autor | [name missing] |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2003 |
| Lugar | Bellingham, WA |
| Idioma | inglés |
| Páginas | 222 |
| ISBN-10 | 081944846X |
| Número de Cutter | M678p |