Process and equipment control in microelectronic manufacturing
19-20 May, 1999, Edinburgh, Scotland
Edición de la obra Process and equipment control in microelectronic manufacturing
| Autor | Kevin Yallup |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1999 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 206 |
| ISBN-10 | 0819432229 |
| OCLC | 41549701 |
| LCCN | 00266414 |
| Serie | Proceedings EurOpt series · Proceedings / SPIE--the International Society for Optical Engineering ; · v. 3742 |