Optical characterization techniques for high-performance microelectronic device manufacturing II
25-26 October 1995, Austin, Texas
Edición de la obra Optical characterization techniques for high-performance microelectronic device manufacturing II
| Autor | John Lowell, Ray T. Chen |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1995 |
| Lugar | Bellingham, Wash |