Optical characterization techniques for high-performance microelectronic device manufacturing
20 October 1994, Austin, Texas
Edición de la obra Optical characterization techniques for high-performance microelectronic device manufacturing
| Autor | John Lowell, Ray T. Chen |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1994 |
| Lugar | Bellingham, Wash., USA |