Novel Vacuum Packaging Design Process for Microelectromechanical System (MEMS) Quad- Mass Gyroscopes
Edición de la obra Novel Vacuum Packaging Design Process for Microelectromechanical System (MEMS) Quad- Mass Gyroscopes
| Autor | U. S. Army Research Laboratory |
|---|---|
| Editorial | CreateSpace Independent Publishing Platform |
| Fecha de publicación | 2017 |
| Idioma | inglés |
| Páginas | 46 |
| ISBN-13 | 9781542768061 |
| Número de Cutter | L123n |