Nano- and microelectromechanical systems
fundamentals of nano- and microenginering
Edición de la obra Nano- and microelectromechanical systems
| Autor | Sergey Edward Lyshevski |
|---|---|
| Editorial | CRC Press |
| Fecha de publicación | 2000 |
| Lugar | Boca Raton, FL |
| Idioma | inglés |
| Páginas | 338 |
| LCCN | 00057953 |
| Serie | Nano- and microscience, engineering, technology, and medicine series |
| Número de Cutter | L993n |
"Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.