Micromachining and microfabrication process technology XVI
25 and 27 January 2011, San Francisco, California, United States
Edición de la obra Micromachining and microfabrication process technology XVI
| Autor | Mary Ann Perez-Maher |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2011 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| ISBN-13 | 9780819484635 |
| ISBN-10 | 0819484636 |
| OCLC | 740435907 |
| LCCN | 2011377975 |
| Serie | Proceedings of SPIE -- v. 7926 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 7926. |