Micromachining and microfabrication process technology XV
26 January 2010, San Francisco, California, United States
Edición de la obra Micromachining and microfabrication process technology XV
| Autor | Mary Ann Perez-Maher |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2010 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| ISBN-13 | 9780819479860 |
| ISBN-10 | 0819479861 |
| OCLC | 642829935 |
| LCCN | 2010459436 |
| Serie | Proceedings of SPIE -- v. 7590 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 7590. |