Microlithography and metrology in micromachining
23-24 October, 1995, Austin, Texas
Edición de la obra Microlithography and metrology in micromachining
| Autor | Michael T. Postek |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1995 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 246 |
| ISBN-10 | 0819420069 |
| OCLC | 33310898 |
| LCCN | 95070375 |
| Serie | Proceedings / SPIE--the International Society for Optical Engineering ; · v. 2640 · Proceedings of SPIE--the International Society for Optical Engineering ; |