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Microelectromechanical Systems

Name: Microelectromechanical Systems
ISBN: 9780309174343

Advanced Materials and Fabrication Methods

Autor	National Research Council, Division on Engineering and Physical Sciences, National Materials Advisory Board, Commission on Engineering and Technical Systems, Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems

Microelectromechanical Systems (1997) — ISBN 9780309174343 | Cutter Number