Microelectromechanical Systems
Advanced Materials and Fabrication Methods
Edición de la obra Microelectromechanical systems
| Autor | Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, Commission on Engineering and Technical Systems, National Research Council (US) |
|---|---|
| Editorial | National Academies Press |
| Fecha de publicación | January 1, 2000 |
| Idioma | inglés |
| Páginas | 76 |
| Formato | Paperback |
| ISBN-13 | 9780309059800 |
| ISBN-10 | 0309059801 |