Ion Implantation Techniques
Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
Edición de la obra Ion Implantation Techniques
| Autor | Heiner Ryssel |
|---|---|
| Editorial | Springer Berlin Heidelberg |
| Fecha de publicación | 1982 |
| Lugar | Berlin, Heidelberg |
| Idioma | inglés |
| Formato | [electronic resource] : |
| ISBN-13 | 9783642687815, 9783642687792 |
| ISBN-10 | 3642687814, 3642687792 |
| OCLC | 851823287 |
| Serie | Springer Series in Electrophysics -- 10 · Springer series in electrophysics -- 10. |