Handbook of Semiconductor Interconnection Technology
Edición de la obra Handbook of semiconductor interconnection technology
| Autor | Schwartz |
|---|---|
| Editorial | CRC |
| Fecha de publicación | November 24, 1997 |
| Idioma | inglés |
| Páginas | 577 |
| Formato | Hardcover |
| ISBN-13 | 9780824799663 |
| ISBN-10 | 0824799666 |
| Número de Cutter | S399h |
This invaluable reference offers the latest information on the application of interconnection technology to semiconductors - covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects.