Handbook of semiconductor interconnection technology
Edición de la obra Handbook of semiconductor interconnection technology
| Autor | Schwartz |
|---|---|
| Editorial | Marcel Dekker |
| Fecha de publicación | 1998 |
| Lugar | New York |
| Idioma | inglés |
| Páginas | 577 |
| ISBN-10 | 0824799666 |
| OCLC | 37755150 |
| LCCN | 97038710 |
| Número de Cutter | S399h |
This invaluable reference offers the latest information on the application of interconnection technology to semiconductors - covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects.