
Gate Stack and Silicide Issues in Silicon Processing II Symposium Held April 17-19, 2001, San Francisco, California, U.S.A
Symposium Held April 17-19, ... Research Society Symposia Proceedings.)
Edición de la obra Gate Stack and Silicide Issues in Silicon Processing II Symposium Held April 17-19, 2001, San Francisco, California, U.S.A
| Autor | S. A. Campbell |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | April 2002 |
| Idioma | inglés |
| Páginas |