Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV
5-7 December 2007, Canberra, Australia
Edición de la obra Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV
| Autor | Hark Hoe Tan |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2008 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| ISBN-13 | 9780819469717 |
| ISBN-10 | 0819469718 |
| OCLC | 212622975 |
| LCCN | 2010483564 |
| Serie | Proceedings of SPIE -- v. 6800 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 6800. |