Número de Cutter-SanbornC532dEntrada «Chi» → 532 · marca de obra “d”

Device and process technologies for MEMS, microelectronics, and photonics III

Name: Device and process technologies for MEMS, microelectronics, and photonics III
ISBN: 081945169X

10-12 December 2003, Perth, Australia

Fecha de publicación
Autor	Jung-Chih Chiao, Alex Hariz, Jamieson, David, Vijay Varadan
Editorial	SPIE

Device and process technologies for MEMS, microelectronics, and photonics III (2004) — ISB | Cutter Number