Device and process technologies for MEMS and microelectronics II
17-19 December, 2001, Adelaide, Australia
Edición de la obra Device and process technologies for MEMS and microelectronics II
| Autor | Jung-Chih Chiao |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2001 |
| Lugar | Bellingham, Wash |
| Idioma | inglés |
| Páginas | 538 |
| ISBN-10 | 0819443220 |
| OCLC | 49052655 |
| LCCN | 2002280119 |
| Serie | SPIE proceedings series ; · v. 4592 · Proceedings of SPIE--the International Society for Optical Engineering ; |