Device and process technologies for MEMS and microelectronics
27-29 October 1999, Royal Pines Resort, Queensland, Australia
Edición de la obra Device and Process Technologies for MEMS and Microelectronics
| Autor | Sima Dimitrijev |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 1999 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 394 |
| ISBN-10 | 0819434930 |
| OCLC | 43166751 |
| LCCN | 00702718 |
| Serie | SPIE proceedings series ; · v. 3892 · Proceedings of SPIE--the International Society for Optical Engineering ; |