Chemical-Mechanical Planarization--Integration, Technology and Reliability
Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Edición de la obra Chemical-Mechanical Planarization--Integration, Technology and Reliability
| Autor | Ashok Kumar |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | January 2005 |
| Idioma | inglés |
| Páginas | 302 |
| Formato | Hardcover |
| ISBN-13 | 9781558998209 |
| ISBN-10 | 1558998209 |
| OCLC | 61263882 |
| LCCN | 2005285362 |