Characterization of Plasma-Enhanced Cvd Processes
Symposium Held November 27-28, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)
Edición de la obra Characterization of plasma-enhanced CVD processes
| Autor | Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | June 1990 |
| Idioma | inglés |
| Páginas | 250 |
| Formato | Hardcover |
| ISBN-13 | 9781558990531 |
| ISBN-10 | 1558990534 |