Characterization of plasma-enhanced CVD processes
symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
Edición de la obra Characterization of plasma-enhanced CVD processes
| Autor | Dale E. Ibbotson, Dennis W. Hess, Gerald Lucovsky |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | 1990 |
| Lugar | Pittsburgh, Pa |
| Idioma | inglés |
| Páginas | 250 |
| ISBN-10 | 1558990534 |
| OCLC | 21974391 |
| LCCN |