Challenges in process integration and device technology
18-19 September 2000, Santa Clara, USA
Edición de la obra Challenges in process integration and device technology
| Autor | David Burnett undifferentiated |
|---|---|
| Editorial | SPIE |
| Fecha de publicación | 2000 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 344 |
| ISBN-10 | 0819438421 |
| OCLC | 45483032 |
| LCCN | 2002275088 |
| Serie | SPIE proceedings series ; · v. 4181 · Proceedings of SPIE--the International Society for Optical Engineering ; |