ASMC 2001
the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.].
Edición de la obra ASMC 2001
| Autor | IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (12th 2001 Munich, Germany) |
|---|---|
| Editorial | IEEE, SEMI |
| Fecha de publicación | 2001 |
| Lugar | Piscataway, New Jersey, San Jose, California |
| Idioma | inglés |
| Páginas | 244 |
| ISBN-10 | 0780365550, 0780365569 |
| OCLC | 48083177 |
| Número de Cutter | I22a |