
ASMC 2000 Proceedings
2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : September 12-14, 2000, Boston, Massachusetts, USA
Edición de la obra ASMC 2000 Proceedings
| Autor | IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (11th 2000 Boston, Massachusetts) |
|---|---|
| Editorial | IEEE, SEMI |
| Fecha de publicación | 2000 |
| Lugar | Piscataway, New Jersey, Mountain View, California |
| Idioma | inglés |
| Páginas | 480 |
| ISBN-10 | 0780359216, 0780359232 |
| OCLC | 45707543 |
| Número de Cutter | I22a |