Advanced techniques for integrated circuit processing II
21-23 September 1992, San Jose, California
Edición de la obra Advanced techniques for integrated circuit processing
| Autor | Lloyd R. Harriott |
|---|---|
| Editorial | SPIE, the International Society for Optical Engineering, SPIE |
| Fecha de publicación | 1993 |
| Lugar | Bellingham, Wash., USA |
| Idioma | inglés |
| Páginas | 404 |
| ISBN-10 | 0819410012 |
| OCLC | 27964433 |
| LCCN | 92062653, 90050808 |
| Serie | SPIE proceedings series -- vol. 1803 · Proceedings of SPIE--the International Society for Optical Engineering -- v. 1803. |