Advanced semiconductor processing and characterization of electronic and optical materials
January 24-25, 1984, Los Angeles, California
Edición de la obra Advanced semiconductor processing and characterization of electronic and optical materials
| Autor | Devendra K. Sadana, Carl M. Lampert |
|---|---|
| Editorial | SPIE--the International Society for Optical Engineering |
| Fecha de publicación | 1984 |
| Lugar | Bellingham, Wash., USA |