Advanced metallization for ULSI applications in 1993
proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A.
Edición de la obra Advanced metallization for ULSI applications in 1993
| Autor | Yosi Shacham-Diamand |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | 1994 |
| Lugar | Pittsburgh, PA |
| Idioma | inglés |
| Páginas | 611 |
| ISBN-10 | 1558992359 |
| OCLC | 29753369 |
| LCCN | 94000675 |
| Serie | Materials Research Society conference proceedings, |