Advanced interconnects and contact materials and processes for future integrated circuits
symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Edición de la obra Advanced interconnects and contact materials and processes for future integrated circuits
| Autor | S. P. Murarka |
|---|---|
| Editorial | Materials Research Society |
| Fecha de publicación | 1998 |
| Lugar | Warrendale, Pa |
| Idioma | inglés |
| Páginas | 560 |
| ISBN-10 | 1558994203 |
| OCLC | 39655352 |
| LCCN | 98039943 |
| Serie | Materials Research Society symposium proceedings ; · v. 514 · Materials Research Society symposia proceedings ; |