2000 5th International Symposium on Plasma Process-Induced Damage
May 22-24, 2000, Santa Clara, California, USA
Edición de la obra 2000 5th International Symposium on Plasma Process-Induced Damage
| Autor | Mitsumasa Koyanagi |
|---|---|
| Editorial | Northern California Chapter of the American Vacuum Society |
| Fecha de publicación | 2000 |
| Lugar | Santa Clara, California |
| Idioma | inglés |
| Páginas | 172 |
| ISBN-10 | 0965157741 |
| OCLC | 45300774 |
| LCCN | 2001273002 |
| Número de Cutter | K88t |
International Symposium on Plasma Process-Induced Damage (5th 2000 Santa Clara, Calif.)